JPH0244367B2 - - Google Patents

Info

Publication number
JPH0244367B2
JPH0244367B2 JP58101447A JP10144783A JPH0244367B2 JP H0244367 B2 JPH0244367 B2 JP H0244367B2 JP 58101447 A JP58101447 A JP 58101447A JP 10144783 A JP10144783 A JP 10144783A JP H0244367 B2 JPH0244367 B2 JP H0244367B2
Authority
JP
Japan
Prior art keywords
main scale
holding member
scale
frame
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58101447A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59226807A (ja
Inventor
Soji Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP10144783A priority Critical patent/JPS59226807A/ja
Priority to US06/616,181 priority patent/US4569137A/en
Publication of JPS59226807A publication Critical patent/JPS59226807A/ja
Publication of JPH0244367B2 publication Critical patent/JPH0244367B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP10144783A 1983-06-07 1983-06-07 直線型変位測定機 Granted JPS59226807A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10144783A JPS59226807A (ja) 1983-06-07 1983-06-07 直線型変位測定機
US06/616,181 US4569137A (en) 1983-06-07 1984-06-01 Linear scale type displacement measuring device and main scale attaching method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10144783A JPS59226807A (ja) 1983-06-07 1983-06-07 直線型変位測定機

Publications (2)

Publication Number Publication Date
JPS59226807A JPS59226807A (ja) 1984-12-20
JPH0244367B2 true JPH0244367B2 (en]) 1990-10-03

Family

ID=14300941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10144783A Granted JPS59226807A (ja) 1983-06-07 1983-06-07 直線型変位測定機

Country Status (1)

Country Link
JP (1) JPS59226807A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2627193B2 (ja) * 1989-07-21 1997-07-02 ソニー・プレシジョン・テクノロジー株式会社 スケール装置
JPH0499014U (en]) * 1991-01-31 1992-08-27
DE19854318A1 (de) * 1998-11-25 2000-05-31 Heidenhain Gmbh Dr Johannes Längenmeßeinrichtung
JP4803798B2 (ja) * 2005-11-10 2011-10-26 ハイデンハイン株式会社 リニアエンコーダ
JP6708449B2 (ja) * 2016-03-22 2020-06-10 株式会社ミツトヨ 直線変位測定装置のスケール保持構造

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2712421C2 (de) * 1977-03-22 1982-06-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßeinrichtung
DE2735154C2 (de) * 1977-08-04 1984-04-05 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßsystem
JPS56112604A (en) * 1980-02-12 1981-09-05 Mitsutoyo Mfg Co Ltd Linear-scale type measuring apparatus

Also Published As

Publication number Publication date
JPS59226807A (ja) 1984-12-20

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